The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2026
Filed:
Mar. 24, 2023
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventor:
Duk Hyun Son, Cheonan-si, KR;
Assignee:
Semes Co., Ltd., Chungcheongnam-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B25J 11/00 (2006.01); B25J 15/00 (2006.01); B25J 15/06 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67766 (2013.01); B25J 11/0095 (2013.01); B25J 15/0014 (2013.01); B25J 15/0616 (2013.01); H01L 21/67742 (2013.01); H01L 21/68707 (2013.01); Y10S 414/141 (2013.01); Y10S 901/40 (2013.01);
Abstract
Provided are a transfer unit and a substrate treatment apparatus which can stably vacuum-adsorb a substrate and can be used for a long time. The transfer unit includes: a robot arm; and an end effector connected to the robot arm, wherein the end effector includes: a body; a vacuum hole formed in the body; and a pad installed on the body to surround the vacuum hole and including a first pad layer and a second pad layer stacked sequentially, wherein the first pad layer has greater elasticity than the second pad layer, and the second pad layer has greater hardness than the first pad layer.