The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 06, 2026
Filed:
Dec. 17, 2022
Semes Co., Ltd., Chungcheongnam-do, KR;
Duk Hyun Son, Chungcheongnam-do, KR;
SEMES CO., LTD., Chungcheongnam-do, KR;
Abstract
Provided is an equipment front end module which can effectively control internal humidity by efficiently circulating an inert gas. The equipment front end module comprises: a module chamber; a side storage installed on a first surface of the module chamber and capable of storing a plurality of substrates therein; an inert gas supplier configured to supply an inert gas into the module chamber, a first exhaust line configured to connect the side storage and an exhaust device; and a flow rate controller installed in the first exhaust line. The inert gas passes through the side storage from the module chamber and flows along the first exhaust line, and the flow rate controller controls a flow rate of the inert gas passing through the side storage.