The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12400886 B1

Date of Patent:

Aug. 26, 2025

Filed:

Dec. 27, 2022

Apparatus for transporting substrate and system for treating substrate with the apparatus

Applicant:

Semes Co., Ltd., Chungcheongnam-do, KR;

Inventors:

Sun Ho Ha, Gyeongsangnam-do, KR;

Duk Hyun Son, Chungcheongnam-do, KR;

Assignee:

SEMES CO., LTD, Chungcheongnam-Do, KR;

Attorney:

Buchanan Ingersoll & Rooney PC

Primary Examiner:

Ronald P Jarrett

Int. Cl.

CPC ...

B25J 19/00 (2006.01); B65G 47/90 (2006.01); B65G 69/20 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01);

U.S. Cl.

CPC ...

H01L 21/67196 (2013.01); B65G 47/90 (2013.01); B65G 69/20 (2013.01); H01L 21/67748 (2013.01); B25J 19/0054 (2013.01);

Abstract

Provided are a substrate transporting apparatus capable of preventing an increase in temperature of a transporting robot by installing a cooling plate around the transporting robot, and a substrate treating system including the same. The substrate transporting apparatus includes a transporting unit for transporting a substrate; and a cooling plate for controlling a temperature of the transporting unit, wherein the cooling plate is spaced apart from a side surface of the transporting unit and installed as a side wall, or is installed in close contact with the side surface of the transporting unit.

Find Patent Forward Citations