Location History:
- Obergroeningen, DE (2009)
- Goeggingen, DE (2011 - 2023)
Company Filing History:
Years Active: 2009-2025
Title: The Innovations of Dieter Bader
Introduction
Dieter Bader, an esteemed inventor based in Goeggingen, Germany, has made significant contributions to the field of lithography and microlithography. With a remarkable portfolio of four patents, he has garnered recognition for his innovative approach to enhancing lithography apparatus technology.
Latest Patents
Among his latest patents is a **Sealing Device, Component and Lithography Apparatus**. This invention provides an effective solution for sealing one component part of a lithography apparatus against multiple second component parts, utilizing a series of sealing rings connected through various locations.
Another notable patent is the **Illumination System of a Microlithographic Projection Exposure Apparatus**. This innovative system incorporates a light source specifically designed to generate projection light along a defined light path. It features a beam deflection array comprising reflective or transmissive elements, which can variably deflect light beams in response to control signals. This technology plays a pivotal role in optimizing the irradiance distribution within the system, utilizing both a first mode of operation for initial measurements and a second mode utilizing an optical raster element for further analysis.
Career Highlights
Dieter Bader's career includes valuable experience at prominent companies, including Carl Zeiss SMT GmbH and Carl Zeiss SMT AG. His work at these leading organizations has directly contributed to advancements in precision optics and lithography technologies.
Collaborations
Throughout his professional journey, Dieter has collaborated with esteemed colleagues like Wilhelm Ulrich and Alexander Epple. These collaborative efforts indicate a commitment to teamwork and innovative problem-solving in the field.
Conclusion
Dieter Bader stands out as a prolific inventor whose contributions have significantly influenced the lithography domain. With his advanced patents and collaborative spirit, he continues to inspire innovation in technology, paving the way for future advancements in the industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.