Company Filing History:
Years Active: 1997-2004
Title: Innovator Spotlight: Diana M. Schonauer – Expert in Semiconductor Processing
Introduction: Diana M. Schonauer, based in San Jose, California, is a distinguished inventor with an impressive portfolio of 19 patents. She has made significant contributions to semiconductor technology, particularly in the area of chemical-mechanical polishing (CMP) for copper interconnects.
Latest Patents: Among her latest patents, Diana has developed methods to prevent precipitation defects on copper interconnects during CMP. Her innovative solutions employ organic compounds with silica adsorption and copper corrosion inhibiting properties. The first patent describes a Ta barrier slurry that utilizes an organic additive, which effectively suppresses the formation of precipitates and copper staining. This additive forms strong bonds to silica and copper surfaces, occupying potential reaction sites and enhancing surface coverage. Furthermore, her other patent addresses the chemical prevention of copper dendrite formation. By immersing the wafer in a specialized acidic bath, the surface of the dielectric field is chemically altered, significantly reducing the risks of dendrite formation and enhancing the reliability of semiconductor devices.
Career Highlights: Diana M. Schonauer currently works at Advanced Micro Devices Corporation, a prominent player in the semiconductor industry. Throughout her career, she has made numerous contributions that have advanced the field of microelectronics. Her expertise in CMP processes has positioned her as a leading authority in improving copper interconnect technology, thereby enhancing device performance.
Collaborations: Throughout her career, Diana has collaborated with talented professionals in her field, including notable coworkers like Steven C. Avanzino and Kai Yang. Together, they have worked on innovative solutions aimed at optimizing semiconductor manufacturing processes, leading to advancements in the industry.
Conclusion: Diana M. Schonauer exemplifies the spirit of innovation and dedication to advancing technology in the semiconductor field. Her work in developing effective solutions for CMP processes has established her as a significant contributor to the industry, and her 19 patents stand as a testament to her expertise and commitment to excellence.