Deqi Wang

Title: Innovations by Deqi Wang: Pioneering Tungsten Fill Technologies in Semiconductor Fabrication

Introduction

Deqi Wang is an influential inventor based in San Jose, California, known for his substantial contributions to the semiconductor industry. With a remarkable portfolio of 16 patents, Wang has developed innovative methods that improve tungsten feature filling techniques, making significant strides in the world of integrated circuit fabrication. His latest research focuses on enhancing efficiency and effectiveness in the filling process, which is critical for modern electronic devices.

Latest Patents

Among his noteworthy patents are methods for feature fill with nucleation inhibition. These patents describe advanced techniques for filling semiconductor features with tungsten while controlling the inhibition of tungsten nucleation. The methods involve selective inhibition, utilizing both direct and remote plasma exposure. This approach allows for modulation of the inhibition effect through pre-inhibition and post-inhibition treatments, facilitating optimal fill across various process parameters. Such innovations have crucial applications in filling vertical features like tungsten vias and horizontal features such as vertical NAND (VNAND) wordlines, ultimately benefiting various memory and logic applications.

Career Highlights

Deqi Wang has made significant contributions to leading companies in the semiconductor industry, including Novellus Systems Incorporated and Lam Research Corporation. His expertise in fabrication technologies has enabled him to play a crucial role in developing advanced systems and methodologies in the manufacturing of semiconductor devices. Wang's invention portfolio showcases his commitment to pushing the boundaries of semiconductor technology and improving production processes.

Collaborations

Throughout his career, Wang has collaborated with notable professionals such as Raashina Humayun and Anand Chandrashekar. These partnerships have allowed him to enhance his research and development efforts, fostering an environment of innovation and creativity in each project. Together, they have explored various avenues of semiconductor technology, making impactful contributions to the field.

Conclusion

Deqi Wang's inventive spirit and dedication to semiconductor advancements are evident through his prolific patent portfolio and collaborations. His innovative methods for tungsten feature filling not only enhance production efficiency but also pave the way for future technology developments in memory and logic applications. Wang's work is a testament to the importance of continuous innovation in keeping pace with the ever-evolving demands of the electronics industry.