Deh Ming Shyu

Title: The Innovative Mind of Deh Ming Shyu

Introduction

Deh Ming Shyu is a distinguished inventor based in Jhunan, Taiwan, recognized for his contributions to the field of optical technologies. With a total of six patents to his name, Shyu has made significant advancements that enhance the accuracy and efficiency of overlay target measurement, which is crucial in semiconductor manufacturing.

Latest Patents

Among his latest innovations, Shyu has developed the following patents:

1. **Method for Designing Two-Dimensional Array Overlay Targets**: This invention provides a systematic approach to design two-dimensional array overlay targets. The method involves selecting a variety of targets with differing overlay errors, calculating deviations in their diffraction spectra, identifying an error-independent target, and ultimately designing a target based on those structural parameters.

2. **Method and System for Measuring Overlay Errors Using the Same**: In this patent, Shyu outlines a comprehensive method for designing a set of two-dimensional array overlay targets. It similarly involves a selection process for various target sets, deviation calculations, and the development of a sensitive overlay target set, emphasizing the importance of precise measurements in the production process.

Career Highlights

Deh Ming Shyu has contributed his expertise to esteemed organizations such as the Industrial Technology Research Institute and Accent Optical Technologies, Inc. His work in these companies has allowed him to develop and refine his innovative methods, pushing the boundaries of optical technology.

Collaborations

Throughout his career, Shyu has worked alongside talented individuals, including Yi Sha Ku and Wei Te Hsu. These collaborations have fostered an environment of innovation, allowing for the exchange of ideas and the development of groundbreaking inventions.

Conclusion

Deh Ming Shyu stands out as a pivotal figure in the realm of optical technology. His six patents demonstrate his commitment to innovation and his ability to solve complex problems in the industry. As he continues to push the boundaries of what's possible, Shyu's work remains integral to the advancements in overlay measurement technologies.