The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2012
Filed:
Dec. 29, 2009
Wei Te Hsu, Banqiao, TW;
Yi Sha Ku, Hsinchu, TW;
Hsiu Lan Pang, Baoshan Township, Hsinchu County, TW;
Deh Ming Shyu, Jhunan Township, Miaoli County, TW;
Wei Te Hsu, Banqiao, TW;
Yi Sha Ku, Hsinchu, TW;
Hsiu Lan Pang, Baoshan Township, Hsinchu County, TW;
Deh Ming Shyu, Jhunan Township, Miaoli County, TW;
Industrial Technology Research Institute, Chutung, Hsinchu, TW;
Abstract
A method for designing a two-dimensional array overlay target set comprises the steps of: selecting a plurality of two-dimensional array overlay target sets having different overlay errors; calculating a deviation of a simulated diffraction spectra for each two-dimensional array overlay target set; selecting a sensitive overlay target set by taking the deviations of the simulated diffraction spectra into consideration; and designing a two-dimensional array overlay target set based on the structural parameters of the sensitive overlay target set.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile