David Bernhardt

Title: Innovations by David Bernhardt

Introduction

David Bernhardt is an accomplished inventor based in Hudson, MA, known for his significant contributions to semiconductor manufacturing technology. With a total of four patents to his name, Bernhardt has made notable advancements in the field, particularly in optical heating and wafer detection systems.

Latest Patents

Among his latest patents is the "Optical heat source with restricted wavelengths for process heating." This invention focuses on a semiconductor manufacturing system or process, such as an ion implantation system, which includes a component for heating a semiconductor workpiece. The optical heat source emits light energy specifically designed to heat the workpiece while minimizing the emission of non-visible wavelengths. This innovation ensures that the light energy is concentrated in a maximum energy light absorption range of the workpiece.

Another significant patent is the "Remote wafer presence detection with passive RFID." This invention involves a system and method for remotely detecting the presence of a wafer. It utilizes a passive RFID circuit attached to a transfer arm located inside a vacuum chamber of an ion implantation system. A reader located outside the vacuum chamber receives indications from the RFID tag, confirming whether a wafer is secured by the transfer arm.

Career Highlights

David Bernhardt is currently employed at Axcelis Technologies, Inc., where he continues to develop cutting-edge technologies in semiconductor manufacturing. His work has been instrumental in enhancing the efficiency and effectiveness of various manufacturing processes.

Collaborations

Throughout his career, Bernhardt has collaborated with notable colleagues, including William Davis Lee and William F DiVergilio. These partnerships have contributed to the successful development and implementation of innovative technologies in the semiconductor industry.

Conclusion

David Bernhardt's contributions to semiconductor manufacturing through his patents and collaborations highlight his role as a leading inventor in the field. His work continues to influence advancements in technology, making significant strides in the industry.