The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 12, 2017
Filed:
Jun. 21, 2013
David Bernhardt, Hudson, MA (US);
W. Davis Lee, Newburyport, MA (US);
William Divergilio, Green Bay, WI (US);
Marvin Farley, Ipswich, MA (US);
David Bernhardt, Hudson, MA (US);
W. Davis Lee, Newburyport, MA (US);
William DiVergilio, Green Bay, WI (US);
Marvin Farley, Ipswich, MA (US);
Axcelis Technologies, Inc., Beverly, MA (US);
Abstract
A semiconductor manufacturing system or process, such as an ion implantation system, apparatus and method, including a component or step for heating a semiconductor workpiece are provided. An optical heat source emits light energy to heat the workpiece. The optical heat source is configured to provide minimal or reduced emission of non-visible wavelengths of light energy and emit light energy at a wavelength in a maximum energy light absorption range of the workpiece.