Danping Peng

Title: Danping Peng: A Pioneering Innovator in Semiconductor Manufacturing

Introduction

Danping Peng is a prominent inventor based in Fremont, CA, with an impressive portfolio of 32 patents. His contributions to the field of semiconductor manufacturing have been particularly impactful, showcasing innovative approaches that harness the capabilities of machine learning.

Latest Patents

Among his latest patents is a groundbreaking invention titled “Machine learning based model builder and its applications for pattern transferring in semiconductor manufacturing.” This invention introduces a system and method for optimizing an optical proximity correction (OPC) model for photo mask patterns, utilizing a machine learning (ML) based model builder that integrates measurement data and a random term generator. The random term generator creates random terms in an M-dimensional space, which the ML based model builder classifies into clusters according to a classifying rule. This process ultimately leads to the identification of a representative subset of random terms, which is subsequently incorporated into the OPC model.

Another notable patent involves methods for preparing photo mask data and manufacturing lithographic masks for integrated circuit production. This patent outlines a comprehensive OPC process applied to a layout pattern, followed by an inverse lithographic technology (ILT) process that enhances the layout pattern to generate an OPC-ILT-enhanced version. The patent also details the generation of contour images from the final mask pattern projections on a wafer and the extraction of features from these images, culminating in outputs from a deep neural network.

Career Highlights

Danping Peng has held significant roles at prestigious companies within the semiconductor industry. He has worked at Taiwan Semiconductor Manufacturing Company Limited, one of the leading semiconductor foundries in the world, and also at Luminescent Technologies, Inc., furthering advancements in the field through his expertise in semiconductor manufacturing techniques.

Collaborations

Throughout his career, Danping has collaborated with numerous esteemed professionals, including his colleagues Daniel S. Abrams and Stanley Joel Osher. These collaborations have been instrumental in driving innovation and enhancing the quality of semiconductor manufacturing processes.

Conclusion

Danping Peng's significant contributions to innovations in semiconductor manufacturing, particularly through his patents utilizing machine learning technologies, position him as a key figure in the industry. His work not only reflects his inventive spirit but also highlights the ongoing evolution of techniques that push the boundaries of semiconductor manufacturing.