Phoenix, AZ, United States of America

Daniel R Trojan

USPTO Granted Patents = 16 

Average Co-Inventor Count = 2.0

ph-index = 5

Forward Citations = 84(Granted Patents)


Location History:

  • Phoenix, AZ (US) (1999 - 2022)
  • Chandler, AZ (US) (2023 - 2024)

Company Filing History:


Years Active: 1999-2025

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16 patents (USPTO):Explore Patents

Title: Innovations and Contributions of Daniel R Trojan

Introduction

Daniel R Trojan is a notable inventor based in Phoenix, AZ, with a remarkable portfolio of 16 patents. His work primarily focuses on advancements in chemical mechanical planarization (CMP) systems, which are crucial in the semiconductor manufacturing process. Trojan's innovative approaches have significantly enhanced the efficiency and effectiveness of wafer polishing techniques.

Latest Patents

Among his latest patents, Trojan has developed a "Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing." This invention includes a CMP system that features a carrier for retaining a substrate, a platen supporting a polishing pad, and a slip sensor that generates signals indicative of the polishing pad's surface characteristics. The system is designed to calibrate a steady-state value of the signal and detect wafer slip during polishing operations, ensuring optimal performance. Another significant patent is for "Temperature controlled substrate carrier and polishing components," which introduces temperature-controlled polishing pads. This innovation utilizes an atomizing system to cool or remove heat from the polishing pad, allowing for higher removal rates during CMP processes.

Career Highlights

Throughout his career, Daniel R Trojan has made significant contributions to the field of semiconductor manufacturing. He has worked with reputable companies such as Axus Technology LLC and Speedfam-IPEC Corporation, where he has applied his expertise to develop cutting-edge technologies in wafer processing.

Collaborations

Trojan has collaborated with esteemed

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