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Chandler, AZ, United States of America

Speedfam-ipec Corporation

USPTO Granted Patents = 151

Trademarks = 5

Forward Citations = 3,026

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129 inventors (with patents filed for the assignee):

Nikolay N Korovin (16 out of 20 patents)

Stephen C Schultz (16 out of 22 patents)

John Derwood Herb (13 out of 15 patents)

4. John Andrew Adams (12 out of 49 patents)

5. Robert F Allen (11 out of 15 patents)

6. Chris E Karlsrud (11 out of 23 patents)

7. Paul L Holzapfel (10 out of 15 patents)

8. Clinton O Fruitman (9 out of 16 patents)

9. Mark A Meloni (9 out of 9 patents)

10. Jose R Gonzalez-Martin (9 out of 9 patents)

11. Saket Chadda (8 out of 10 patents)

12. Thomas Laursen (8 out of 14 patents)

13. Periya Gopalan (8 out of 10 patents)

14. Timothy S Dyer (8 out of 17 patents)

15. James L Farmer (8 out of 10 patents)

Core Competencies:

Chemical Mechanical Planarization

Slurry Distribution Control

Electrochemical Deposition

Workpiece Handling

Polishing Pad Technology

Endpoint Detection

Robotic Automation

Clean Room Facilities

Multizone Processing

Wear Ring Assembly

Predictive Determination

Wafer Cleaning

151 patents: Sort by Forward Citations

1. 7314402 - Method and apparatus for controlling slurry distribution (2008-01-01),

2. 7229343 - Orbiting indexable belt polishing station for chemical mechanical polishing (2007-06-12),

3. 7140956 - Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece (2006-11-28),

4. 7083515 - Clean room facility and construction method (2006-08-01),

5. 7083501 - Methods and apparatus for the chemical mechanical planarization of electronic devices (2006-08-01),

6. 7033464 - Apparatus for electrochemically depositing a material onto a workpiece surface (2006-04-25),

7. 7025664 - Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece (2006-04-11),

8. 7014541 - Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece (2006-03-21),

9. 6979034 - Workpiece handling end-effector and a method for processing workpieces using a workpiece handling end-effector (2005-12-27),

10. 6974525 - Method and apparatus for electrochemical planarization of a workpiece (2005-12-13),

11. 6960115 - Multiprobe detection system for chemical-mechanical planarization tool (2005-11-01),

12. 6923711 - Multizone carrier with process monitoring system for chemical-mechanical planarization tool (2005-08-02),

13. 6913528 - Low amplitude, high speed polisher and method (2005-07-05),

14. 6878039 - Polishing pad window for a chemical-mechanical polishing tool (2005-04-12),

15. 6852007 - Robotic method of transferring workpieces to and from workstations (2005-02-08),

SpeedFam-IPEC Corporation is a global leader in the design and manufacture of innovative wafer processing equipment and solutions. With a history spanning over 60 years, the company has gained a reputation for delivering cutting-edge technologies and unparalleled support to the semiconductor and related industries. Their products include polishing machines, cleaners, grinders, and other equipment used in wafer fabrication and advanced packaging processes. SpeedFam-IPEC Corporation is committed to meeting their customers' needs for precision, productivity, and quality in the highly demanding semiconductor industry.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

151 Patents

#6 in Chandler, AZ

#29 in Arizona

#2,522 in US

#5,273 in the World

Chandler, AZ, United States of America

Speedfam-ipec Corporation

Forward Citations = 3,026

129 inventors:

Nikolay N Korovin (16 out of 20 patents)

Stephen C Schultz (16 out of 22 patents)

John Derwood Herb (13 out of 15 patents)

4. John Andrew Adams (12 out of 49 patents)

5. Robert F Allen (11 out of 15 patents)

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