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Chandler, AZ, United States of America

Speedfam-Ipec Corporation

USPTO Granted Patents = 151

% Expired Patents = 14.6

Trademarks = 5

Forward Citations = 3,068

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129 inventors (with patents filed for the assignee):

Nikolay N Korovin (16 out of 20 patents)

Stephen C Schultz (16 out of 22 patents)

John Derwood Herb (13 out of 15 patents)

4. John Andrew Adams (12 out of 49 patents)

5. Robert F Allen (11 out of 15 patents)

6. Chris E Karlsrud (11 out of 23 patents)

7. Paul L Holzapfel (10 out of 15 patents)

8. Clinton O Fruitman (9 out of 16 patents)

9. Mark A Meloni (9 out of 9 patents)

10. Jose R Gonzalez-Martin (9 out of 9 patents)

11. Saket Chadda (8 out of 10 patents)

12. Thomas Laursen (8 out of 14 patents)

13. Periya Gopalan (8 out of 10 patents)

14. Timothy S Dyer (8 out of 17 patents)

15. James L Farmer (8 out of 10 patents)

Core Competencies:

Slurry Distribution

Chemical Mechanical Polishing

Endpoint Detection

Workpiece Carrier

Planarization

Electrochemical Deposition

Pressure Control

Cleaning Methods

Polishing Pad

Wafer Processing

Microreplicated Surface

In-situ Measurement

151 patents: Sort by Forward Citations

1. 7314402 - Method and apparatus for controlling slurry distribution (2008-01-01),

2. 7229343 - Orbiting indexable belt polishing station for chemical mechanical polishing (2007-06-12),

3. 7140956 - Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece (2006-11-28),

4. 7083515 - Clean room facility and construction method (2006-08-01),

5. 7083501 - Methods and apparatus for the chemical mechanical planarization of electronic devices (2006-08-01),

6. 7033464 - Apparatus for electrochemically depositing a material onto a workpiece surface (2006-04-25),

7. 7025664 - Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece (2006-04-11),

8. 7014541 - Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece (2006-03-21),

9. 6979034 - Workpiece handling end-effector and a method for processing workpieces using a workpiece handling end-effector (2005-12-27),

10. 6974525 - Method and apparatus for electrochemical planarization of a workpiece (2005-12-13),

11. 6960115 - Multiprobe detection system for chemical-mechanical planarization tool (2005-11-01),

12. 6923711 - Multizone carrier with process monitoring system for chemical-mechanical planarization tool (2005-08-02),

13. 6913528 - Low amplitude, high speed polisher and method (2005-07-05),

14. 6878039 - Polishing pad window for a chemical-mechanical polishing tool (2005-04-12),

15. 6852007 - Robotic method of transferring workpieces to and from workstations (2005-02-08),

Speedfam-Ipec Corporation, headquartered in Chandler, AZ, specializes in advanced chemical mechanical polishing (CMP) technologies essential for semiconductor manufacturing. The company focuses on developing innovative solutions in slurry distribution, endpoint detection, and workpiece carrier systems, which enhance the planarization process. Additionally, Speedfam-Ipec is engaged in electrochemical deposition, pressure control, and cleaning methods, contributing to the efficiency and precision of semiconductor fabrication processes.

Profile summary based on public USPTO records.

Company Badge

USPTO Data Jan 1 1976 - Sep 29 2026

151 Patents

#5 in Chandler, AZ

#28 in Arizona

#2,602 in US

#5,395 in the World

Chandler, AZ, United States of America

Speedfam-Ipec Corporation

Forward Citations = 3,068

129 inventors:

Nikolay N Korovin (16 out of 20 patents)

Stephen C Schultz (16 out of 22 patents)

John Derwood Herb (13 out of 15 patents)

4. John Andrew Adams (12 out of 49 patents)

5. Robert F Allen (11 out of 15 patents)

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