Company Filing History:
Years Active: 1992-2005
Title: Chris E. Karlsrud: Innovator in Robotic Systems for Semiconductor Processing
Introduction
Chris E. Karlsrud, based in Chandler, AZ, is a prolific inventor with a remarkable portfolio of 23 patents to his name. His innovations primarily focus on robotic systems used in the processing of semiconductor wafers, reflecting his expertise and dedication to advancing manufacturing technologies.
Latest Patents
Karlsrud's latest patents include a sophisticated robotic method for transferring workpieces to and from workstations, which is integral to polishing, cleaning, rinsing, and drying semiconductor wafers. This invention features a load/unload station equipped with multiple platforms for receiving cassettes of wafers slated for processing. The system employs a dry end-effector robot to retrieve the wafers from the cassettes and transfer them to an index table.
A transfer apparatus utilizes wafer carrier elements to transport the wafers to a polishing table and subsequently return them to the index table for further treatments. Following polishing, a flipper mechanism directs the polished wafers to a comprehensive cleaning station which includes scrub stations, a rinsing station, and a spin dryer station. The cleaning process is further supported by a connective system of water tracks. The wet end-effector of the robot is responsible for transferring the rinsed wafers to the spin dryer station, while the dry end-effector returns the dried wafers back to their original cassettes.
Career Highlights
Karlsrud has significantly contributed to the semiconductor processing industry through his work with notable companies such as Speedfam Corporation and Speedfam-IPEC Corporation. His experience in these organizations has uniquely positioned him to innovate within the field, combining knowledge from both practical and theoretical perspectives.
Collaborations
Throughout his career, Chris has collaborated with esteemed professionals including Jose R. Gonzalez-Martin and Periya Gopalan. These collaborations have likely facilitated knowledge sharing and the development of groundbreaking technologies in semiconductor processing.
Conclusion
Chris E. Karlsrud stands out in the realm of semiconductor manufacturing innovations. With his impressive collection of 23 patents and a career dedicated to enhancing robotic systems for wafer processing, he continues to influence the industry and pave the way for future advancements. His work exemplifies the integration of engineering excellence and innovation in robotics and automation technology.
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