The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2005
Filed:
Mar. 12, 2004
Randy Mcnurlin, Phoenix, AZ (US);
Mark Maggio, Phoenix, AZ (US);
Michael Smigel, Phoenix, AZ (US);
Ann Wilkey, Phoenix, AZ (US);
James L. Farmer, Tempe, AZ (US);
Shawn Robertson, Phoenix, AZ (US);
Randy McNurlin, Phoenix, AZ (US);
Mark Maggio, Phoenix, AZ (US);
Michael Smigel, Phoenix, AZ (US);
Ann Wilkey, Phoenix, AZ (US);
James L. Farmer, Tempe, AZ (US);
Shawn Robertson, Phoenix, AZ (US);
SpeedFam IPEC Corporation, Chandler, AZ (US);
Abstract
A two sided wafer handling end-effector provides for the efficient loading and unloading of wafers into and out of a wafer processing apparatus. Each side of the end-effector includes spaced apart rotatable catch mechanisms between which a wafer is firmly grasped. When the end-effector is positioned beneath the wafer processing apparatus the catch mechanisms are rotated to an open position and a lifting surface on the catch mechanisms lifts the wafer into the wafer processing apparatus. When the catch mechanisms are in the open position the wafer is centered on the end-effector by rotatable rocker assemblies that contact the edge of the wafer. As the end-effector is raised into contact with the processing apparatus, the rocker assemblies rotate to a lowered position in the end-effector while arcuate surfaces on the assemblies maintain contact with the wafer edge.