The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 12, 2005
Filed:
Jan. 28, 2002
Charles Chiun-chieh Yang, Gilbert, AZ (US);
John D. Herb, Phoenix, AZ (US);
Stephen C. Schultz, Gilbert, AZ (US);
Charles Chiun-Chieh Yang, Gilbert, AZ (US);
John D. Herb, Phoenix, AZ (US);
Stephen C. Schultz, Gilbert, AZ (US);
Speedfam-IPEC Corporation, Chandler, AZ (US);
Abstract
A polishing pad assembly for use in a chemical-mechanical polishing apparatus comprises a polishing pad having at least a first aperture therethrough and a platen for supporting the polishing pad having a second aperture therethrough at least a portion of which is larger than the first aperture. A substantially transparent plug includes at least a first section having a first dimension for positioning substantially within the first aperture and at least a second section having a second dimension larger than the first dimension for positioning substantially within the second aperture. The optical plug is made of a polymeric material which may be press-fit through the platen into polishing pad.