Location History:
- Tempe, AZ (US) (2001 - 2002)
- Louisville, TX (US) (2004)
- Lewisville, TX (US) (2004 - 2005)
Company Filing History:
Years Active: 2001-2005
Title: Mark A. Meloni: Innovator in Chemical-Mechanical Planarization
Introduction
Mark A. Meloni is a distinguished inventor based in Lewisville, TX, with a commendable portfolio of nine patents to his name. He has made significant contributions to the field of chemical-mechanical planarization, showcasing his commitment to innovation and excellence in technology.
Latest Patents
One of his most notable inventions is the "Multiprobe Detection System for Chemical-Mechanical Planarization Tool." This innovative method and apparatus are designed to planarize a wafer effectively. By taking discrete measurements across the wafer's surface at a specified spatial density, the invention employs a flash lamp to reflect a light signal from the wafer's surface, which a spectrometer then analyzes. The system uses multiple probes at different locations to expedite the measurement process, allowing for simultaneous sampling of various areas on the wafer. A control system analyzes the gathered data to identify regions requiring adjustments in material removal rates. By refining planarization parameters, the system enhances processing for both current and future wafers.
Career Highlights
Mark A. Meloni currently works at Speedfam-IPEC Corporation, where his expertise in chemical-mechanical planarization contributes to advancing semiconductor manufacturing technologies. His extensive experience and patent portfolio underscore his role as a leading innovator in the industry.
Collaborations
Throughout his career, Mark has collaborated with notable colleagues, including Clinton O. Fruitman and Matthew Weldon. Their collective efforts have fostered a dynamic environment for innovation, enabling the development of cutting-edge solutions within the field.
Conclusion
Mark A. Meloni exemplifies the spirit of invention in the realm of chemical-mechanical planarization. His innovative approach and dedication to improving wafer manufacturing processes highlight the importance of continued research and development in technology. As he progresses in his career, the impact of his contributions will surely resonate within the industry and inspire future generations of inventors.