The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 01, 2006
Filed:
Jan. 16, 1998
Applicant:
Clinton O. Fruitman, Chandler, AZ (US);
Inventor:
Clinton O. Fruitman, Chandler, AZ (US);
Assignee:
SpeedFam-IPEC Corporation, Chandler, AZ (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Method and apparatus for chemically and mechanically planarizing the surface of a silicon wafer which includes a compressible non-cellualar lapping surface and a slurry disposed between the wafer and the lapping surface.