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EPO Patents = 1

Trademarks = 5

Forward Citations = 1

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7 inventors (with patents filed for the assignee):

Daniel R Trojan (9 out of 16 patents)

Richard Ciszek (3 out of 4 patents)

Clifford Daniel (3 out of 4 patents)

4. John Kevin Shugrue (2 out of 21 patents)

5. William Manfred Daschbach (1 out of 1 patent)

6. Robert Clark Roberts (1 out of 2 patents)

7. Daniel Ray Trojan (1 out of 1 patent)

10 patents: Sort by Forward Citations

1. 12377520 - Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing (2025-08-05),

2. 12217979 - Temperature controlled substrate carrier and polishing components (2025-02-04),

3. 12198935 - Atmospheric plasma in wafer processing system optimization (2025-01-14),

4. 12145236 - Containment and exhaust system for substrate polishing components (2024-11-19),

5. 12023778 - Substrate carrier head and processing system (2024-07-02),

6. 11904431 - Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing (2024-02-20),

7. 11685012 - Planarized membrane and methods for substrate processing systems (2023-06-27),

8. 11376705 - Chemical mechanical planarization carrier system (2022-07-05),

9. 9390903 - Method and apparatus for wafer backgrinding and edge trimming on one machine (2016-07-12),

10. 8944887 - Apparatus and method for surface grinding and edge trimming workpieces (2015-02-03),

Axus Technology LLC is a leading provider of CMP, wafer thinning and wafer polishing equipment and polishing services for semiconductor, MEMS, medical, sensors and optical components industries. With over 20 years of experience, Axus Technology offers a wide range of innovative solutions for precision material removal and surface finishing.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Jan 20 2026

10 Patents

#38 in Chandler, AZ

#379 in Arizona

#29,060 in US

#54,443 in the World

Chandler, AZ, United States of America

Axus Technology LLC