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Hsinchu, Taiwan

Chia-I Shen

USPTO Granted Patents = 7

Average Co-Inventor Count = 4.8

ph-index = 2

Forward Citations = 58(Granted Patents)

Location History:

Kaoshiung, TW (2002)
Hsin-Chu, TW (2014 - 2020)

Company Filing History:

7 out of 40,635

Taiwan Semiconductor Manufacturing Comp. Ltd.

Years Active: 2002-2025

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7 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 12394602 - Wafer processing method (2025-08-19),

2. 10741366 - Process chamber and wafer processing method (2020-08-11),

3. 10669625 - Pumping liner for chemical vapor deposition (2020-06-02),

4. 10008367 - Gas diffuser unit, process chamber and wafer processing method (2018-06-26),

5. 9048268 - Method and equipment for removing photoresist residue after dry etch (2015-06-02),

6. 8889435 - Plasma density control (2014-11-18),

7. 6463782 - Self-centering calibration tool and method of calibrating (2002-10-15),

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