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For the Inventor, By the Inventor

Sunnyvale, CA, United States of America

Cheng-Yu (Sean) Lin

This inventor holds 13 USPTO granted patents. Top assignee: Lam Research Corporation. Active years: 2010-2014.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Cheng-Yu (Sean) Lin. Retrieved from https://idiyas.com/inventor/cheng-yu-sean-lin

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 13

% Patents Active = 23.1

Average Co-Inventor Count = 3.7

ph-index = 2

Forward Citations = 161(Granted Patents)


Location History:

  • Sunnyvale, CA (US) (2010 - 2014)
  • Mountain View, CA (US) (2012 - 2014)
  • Cupertino, CA (US) (2014)

Company Filing History:

goldMedal13 out of 3,945 
 
Lam Research Corporation
 patents

Years Active: 2010-2014

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13 patents (USPTO):Explore Patents
1. 8900400 - Proximity head having a fluid resistor (2014-12-02),
2. 8900374 - Method for substrate cleaning including movement of substrate below substrate cleaning module (2014-12-02),
3. 8757177 - Multi-stage substrate cleaning method and apparatus (2014-06-24),
4. 8739805 - Confinement of foam delivered by a proximity head (2014-06-03),
5. 8557051 - Method for using generator for foam to clean substrate (2013-10-15),
6. 8317966 - Apparatus for substantially uniform fluid flow rates relative to a proximity head in processing of a wafer surface by a meniscus (2012-11-27),
7. 8317934 - Multi-stage substrate cleaning method and apparatus (2012-11-27),
8. 8313582 - System, method and apparatus for maintaining separation of liquids in a controlled meniscus (2012-11-20),
9. 8246755 - In situ morphological characterization of foam for a proximity head (2012-08-21),
10. 8161984 - Generator for foam to clean substrate (2012-04-24),
11. 8141566 - System, method and apparatus for maintaining separation of liquids in a controlled meniscus (2012-03-27),
12. 7998304 - Methods of configuring a proximity head that provides uniform fluid flow relative to a wafer (2011-08-16),
13. 7849554 - Apparatus and system for cleaning substrate (2010-12-14),

Title: Innovative Contributions of Cheng-Yu (Sean) Lin in the Field of Substrate Cleaning Technologies

Introduction

Cheng-Yu (Sean) Lin, based in Sunnyvale, California, is an influential inventor specializing in substrate cleaning technologies. With a remarkable portfolio of 13 patents, his creative contributions significantly advance various processes used in semiconductor manufacturing. His expertise and innovation have helped shape the industry and enhance cleaning methodologies.

Latest Patents

Among his latest inventive works is a method for substrate cleaning that involves the movement of a substrate underneath a substrate cleaning module. This ingenious approach includes the downward dispensing of a cleaning material along the leading edge of the cleaning module while simultaneously introducing a rinsing material along the trailing edge. This process generates a rinsing meniscus, and efficient vacuum suction is applied to ensure optimal cleaning. Additionally, Cheng-Yu has developed a proximity head featuring a fluid resistor, characterized by a unique design that incorporates multiple bores to enhance fluid dynamics within the device. These innovative patents illustrate his commitment to improving the efficiency and effectiveness of semiconductor cleaning processes.

Career Highlights

Cheng-Yu Lin has established himself as a key member of Lam Research Corporation, where he contributes to cutting-edge technology development in the semiconductor field. His extensive experience and prolific output of patents reflect his dedication to advancing industry standards and practices.

Collaborations

Throughout his career, Cheng-Yu has had the pleasure of collaborating with esteemed colleagues, including Arnold Kholodenko and Leon Ginzburg. Together, they work towards pushing the boundaries of technological capabilities within their organization, exemplifying the spirit of teamwork and innovation that drives progress in the semiconductor industry.

Conclusion

Cheng-Yu (Sean) Lin's impressive record of patents and innovative strategies significantly impacts the semiconductor cleaning technology landscape. His work not only demonstrates his ingenuity but also serves as a valuable asset to Lam Research Corporation and the industry at large. As technology continues to evolve, inventors like Cheng-Yu play a vital role in paving the way for future advancements.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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