The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2013
Filed:
Apr. 12, 2012
Arnold Kholodenko, San Francisco, CA (US);
Anwar Husain, Pleasanton, CA (US);
Gregory A. Tomasch, Kelseyville, CA (US);
Cheng-yu (Sean) Lin, Sunnyvale, CA (US);
Arnold Kholodenko, San Francisco, CA (US);
Anwar Husain, Pleasanton, CA (US);
Gregory A. Tomasch, Kelseyville, CA (US);
Cheng-Yu (Sean) Lin, Sunnyvale, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A system for cleaning a substrate with a foam performs a method for generating a cleaning foam. In the first operation of the method, the system pumps a fluid into a premix chamber. The premix chamber is a component of a male plug which fits into a female housing in the system. Then the system injects a gas into the premix chamber to initiate generation of the foam from the fluid. The foam flows from the premix chamber into a sealed helical channel formed by a helical indentation on an outside surface of the male plug and an inner surface of the female housing to allow the foam to reach a desired state along a length of the sealed helical channel. In the last operation of the method, the foam outputs from an exit end of the helical channel through the male plug to a component of the system.