The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 02, 2014
Filed:
Nov. 09, 2010
Cheng-yu (Sean) Lin, Sunnyvale, CA (US);
Mark Kawaguchi, Sunnyvale, CA (US);
Mark Wilcoxson, Oakland, CA (US);
Russell Martin, Livermore, CA (US);
Leon Ginzburg, Santa Clara, CA (US);
Cheng-Yu (Sean) Lin, Sunnyvale, CA (US);
Mark Kawaguchi, Sunnyvale, CA (US);
Mark Wilcoxson, Oakland, CA (US);
Russell Martin, Livermore, CA (US);
Leon Ginzburg, Santa Clara, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A substrate is moved below a substrate cleaning module in a direction extending from a leading edge to a trailing edge of the substrate cleaning module. A cleaning material is dispensed downward toward a top surface of the substrate along the leading edge of the substrate cleaning module. A rinsing material is dispensed downward toward the top surface of the substrate along the trailing edge of the substrate cleaning module to generate a rinsing meniscus. Vacuum suction is applied at a vacuum suction location along a bottom surface of the substrate cleaning module and parallel to the leading and trailing edges of the substrate cleaning module. The vacuum location is positioned between a dispense location of the cleaning material and a dispense location of the rinsing material. A plenum region located between the dispense location of the cleaning material and the vacuum location is vented.