The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 24, 2012
Filed:
Aug. 04, 2008
Arnold Kholodenko, San Francisco, CA (US);
Anwar Husain, Pleasanton, CA (US);
Gregory A. Tomasch, Kelseyville, CA (US);
Cheng-yu (Sean) Lin, Sunnyvale, CA (US);
Arnold Kholodenko, San Francisco, CA (US);
Anwar Husain, Pleasanton, CA (US);
Gregory A. Tomasch, Kelseyville, CA (US);
Cheng-Yu (Sean) Lin, Sunnyvale, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
In an example embodiment, a device for generating a cleaning foam includes a female housing and a male plug. The plug includes an aperture into which a fluid flows from another component of the cleaning system. The plug includes a premix chamber which receives the fluid from the aperture and into which a gas is injected to form a foam. In an example embodiment, the chamber is a hollow cylinder and the gas is injected into the cylinder through channels which are tangential to the cylinder. The plug also includes a solid cylinder with a continuous helical indentation on the outside of the solid cylinder. When the male plug is inserted into the female housing, the continuous helical indentation and the inner surface of the housing form a helical channel through which the foam flows and is further mixed on its way back into the cleaning system.