This inventor holds 3 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2005-2010.
Company Filing History:
Years Active: 2005-2010
Title: Cheng-I Sun: Innovator in Thermal Process Control
Introduction
Cheng-I Sun is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of thermal process control, holding a total of 3 patents. His work focuses on enhancing the efficiency and accuracy of thermal processing systems, which are crucial in semiconductor manufacturing.
Latest Patents
One of Cheng-I Sun's latest patents is titled "Method and system for thermal process control." This innovative thermal process system comprises a thermal processor, a metrology tool, and a controller. The thermal processor performs a thermal process as defined by a heating model to form a film on a wafer surface. The metrology tool, which is interfaced with the thermal processor, inspects the thickness of the film. The controller, coupled with both the thermal processor and the metrology tool, generates the heating model of the thermal processor and calibrates it according to a preset slope coefficient matrix and the measured thickness.
Another notable patent is the "Multivariate RBR tool aging adjuster." This invention describes a multiple run by run process involving a plurality of tools and products. A desired recipe is calculated for each product on each tool based on a previous recipe and the deviation of a parameter from a target value. The plurality of products is then run on the plurality of tools, with the desired recipe being updated after each run.
Career Highlights
Cheng-I Sun is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this company has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in semiconductor manufacturing processes.
Collaborations
Cheng-I Sun has collaborated with notable colleagues such as Yi-Chuan Lo and Wei-Hsuang Huang. These collaborations have fostered a productive environment for innovation and development in their respective fields.
Conclusion
Cheng-I Sun is a distinguished inventor whose work in thermal process control has made a significant impact on the semiconductor industry. His patents reflect his commitment to advancing technology and improving manufacturing processes.