The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 17, 2005
Filed:
Dec. 06, 2002
Cheng-i Sun, Taipei, TW;
Ben Fung, Hsin-Chu, TW;
Yi-chuan Lo, Hsin-Chu, TW;
Wei-hsuang Huang, Tao-Yuan, TW;
Hsiang-min Lin, Hsin-Chu, TW;
Cheng-I Sun, Taipei, TW;
Ben Fung, Hsin-Chu, TW;
Yi-Chuan Lo, Hsin-Chu, TW;
Wei-Hsuang Huang, Tao-Yuan, TW;
Hsiang-Min Lin, Hsin-Chu, TW;
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Abstract
A multiple run by run process is described. A plurality of tools and a plurality of products to be run on the tools are provided. Tool effects and product effects on a parameter are identified for each tool and each product. A desired recipe is calculated for each product on each tool based on the tool effects and product effects identified. Thereafter, the plurality of products is run on the plurality of tools. The desired recipe is updated after each run of each tool. Tool aging is calculated after each run of each tool based on the desired recipe used.