Taiwan Semiconductor Manufacturing Comp. Ltd.

Cheng-I Sun

Yi-Chuan Lo

Wei-Hsuang Huang

Yung-Chih Chang

Fu-Kun Yeh

Chun-I Kuo

Hsiang-Ming Lin

Ben Fung

Hsueh-Chi Shen

Hsiang-Min Lin

Yu Pen Fun

A thermal process system. The thermal process system comprises a thermal processor, a metrology tool, and a controller. The thermal processor performs a thermal process as defined by a heating model to form a film on a wafer surface. The metrology tool, interfaced with the thermal processor, inspects thickness of the film. The controller, coupled with the thermal processor and the metrology tool, generates the heating model of the thermal processor and calibrates the heating model according to a preset slope coefficient matrix and the measured thickness.

Method and system for thermal process control

A multiple run by run process is described. A plurality of tools and a plurality of products to be run on the tools are provided. A desired recipe is calculated for each product on each tool based on a previous recipe used for each product on each tool and deviation of a parameter from a target value. Thereafter, the plurality of products is run on the plurality of tools. The desired recipe is updated after each run of each tool.

Multivariate RBR tool aging adjuster

A multiple run by run process is described. A plurality of tools and a plurality of products to be run on the tools are provided. Tool effects and product effects on a parameter are identified for each tool and each product. A desired recipe is calculated for each product on each tool based on the tool effects and product effects identified. Thereafter, the plurality of products is run on the plurality of tools. The desired recipe is updated after each run of each tool. Tool aging is calculated after each run of each tool based on the desired recipe used.

Multivariate RBR tool aging detector

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Taipei, Taiwan

Cheng-I Sun