The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 24, 2005
Filed:
Dec. 31, 2003
Cheng-i Sun, Taipei, TW;
Yu Pen Fun, Hsin-Chu, TW;
Yi-chuan Lo, Hsin-Chu, TW;
Wei-hsuang Huang, Hsin-Chu, TW;
Hsiang-ming Lin, Hsin-Chu, TW;
Cheng-I Sun, Taipei, TW;
Yu Pen Fun, Hsin-Chu, TW;
Yi-Chuan Lo, Hsin-Chu, TW;
Wei-Hsuang Huang, Hsin-Chu, TW;
Hsiang-Ming Lin, Hsin-Chu, TW;
Taiwan Semiconductor Manufacturing Company, Hsin-Chu, TW;
Abstract
A multiple run by run process is described. A plurality of tools and a plurality of products to be run on the tools are provided. A desired recipe is calculated for each product on each tool based on a previous recipe used for each product on each tool and deviation of a parameter from a target value. Thereafter, the plurality of products is run on the plurality of tools. The desired recipe is updated after each run of each tool.