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For the Inventor, By the Inventor

Hsinchu, Taiwan

Che-Hao Tu

USPTO Granted Patents = 15 

Average Co-Inventor Count = 4.0

ph-index = 3

Forward Citations = 19(Granted Patents)


Company Filing History:

goldMedal15 out of 40,635 
 
Taiwan Semiconductor Manufacturing Comp. Ltd.
 patents

Years Active: 2013-2024

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15 patents (USPTO):Explore Patents
1. 12128455 - Electrical cleaning tool for wafer polishing tool system (2024-10-29),
2. 12068196 - Forming gate line-end of semiconductor structures with improved metal gate height (2024-08-20),
3. 11951587 - Zone-based CMP target control (2024-04-09),
4. 11854821 - Hard mask removal method (2023-12-26),
5. 10971370 - Hard mask removal method (2021-04-06),
6. 10943822 - Forming gate line-end of semiconductor structures (2021-03-09),
7. 10800004 - System and method of chemical mechanical polishing (2020-10-13),
8. 10510552 - Hard mask removal method (2019-12-17),
9. 9960050 - Hard mask removal method (2018-05-01),
10. 9941109 - Surface treatment in a chemical mechanical process (2018-04-10),
11. 9922837 - Asymmetric application of pressure to a wafer during a CMP process (2018-03-20),
12. 9711374 - Mechanisms for forming oxide layer over exposed polysilicon during a chemical mechanical polishing (CMP) process (2017-07-18),
13. 9595450 - Composite structure for gate level inter-layer dielectric (2017-03-14),
14. 8975179 - Planarization process for semiconductor device fabrication (2015-03-10),
15. 8598028 - Gate height loss improvement for a transistor (2013-12-03),

Title: Che-Hao Tu: Innovator in Semiconductor Technology

Introduction

Che-Hao Tu is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 15 patents. His work focuses on improving processes and tools used in semiconductor fabrication, showcasing his innovative spirit and technical expertise.

Latest Patents

Among his latest patents, Che-Hao Tu has developed an electrical cleaning tool for wafer polishing tool systems. This method involves providing a slurry to a polishing pad, which is disposed on a wafer platen. The slurry contains electrically charged abrasive particles. The process includes moving a wafer into contact with the slurry and applying electrical charges to enhance cleaning efficiency. Another notable patent involves forming gate line-ends of semiconductor structures with improved metal gate height. This method defines the height of gate structures during fabrication, ensuring optimal performance in semiconductor devices.

Career Highlights

Che-Hao Tu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing the technology used in semiconductor manufacturing, contributing to the company's reputation for innovation and quality.

Collaborations

Throughout his career, Che-Hao Tu has collaborated with notable colleagues, including Ying-Tsung Chen and William Weilun Hong. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies.

Conclusion

Che-Hao Tu's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the industry and pave the way for future advancements.

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