Company Filing History:
Years Active: 2020-2025
Title: **Innovative Mind Behind Semiconductor Advancements: Che-Chang Hsu**
Introduction
Che-Chang Hsu, a prominent inventor based in Taichung, Taiwan, has made significant contributions to the field of semiconductor technology. With an impressive portfolio of 18 patents, he is recognized for his innovative approach to solving complex issues within semiconductor processing.
Latest Patents
Hsu's latest patents include groundbreaking inventions such as a semiconductor processing tool and methods of operation. This exposure tool is designed to remove contaminants while preventing contamination of mirrors and optical components, ensuring optimal performance. It employs heated gases like ozone or extra clean dry air to flush out pollutants from the tool's illuminator and other subsystems. Further innovation comes from a gas curtain mechanism that utilizes hydrogen or alternative gases to protect mirrors from contaminants, thus enhancing the exposure tool's efficiency.
Another notable invention is a reticle cleaning device and its method of use, which features a contact surface designed to bond with particles within extreme ultraviolet lithography tools. This device is equipped with a stress sensor that ensures the support member's integrity during cleaning operations, effectively preventing damage to the reticle by halting movement once a stress threshold is met.
Career Highlights
Currently, Che-Chang Hsu is associated with Taiwan Semiconductor Manufacturing Company Limited, one of the largest and most influential players in the semiconductor industry. His tenure at this prestigious company allows him to work at the forefront of technological advancements alongside a team of skilled professionals.
Collaborations
Throughout his career, Hsu has collaborated with notable coworkers such as Li-Jui Chen and Po-Chung Cheng. These collaborations have played an essential role in the development of his innovative inventions, further demonstrating the importance of teamwork in advancing semiconductor technology.
Conclusion
Che-Chang Hsu's ongoing innovations in semiconductor processing not only contribute to the efficiency of current technologies but also pave the way for future advancements in the industry. His commitment to excellence and innovation exemplifies the spirit of inventorship, making him a significant figure in the realm of semiconductor inventions.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.