Chao-Lung Chen

Title: Innovations of Chao-Lung Chen

Introduction

Chao-Lung Chen is a prominent inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 7 patents. His work focuses on advancements in electroplating and semiconductor device structures.

Latest Patents

One of his latest patents is a plating apparatus and method for electroplating wafers. This innovative apparatus includes a housing that defines a plating chamber for housing a plating solution. A voltage source within the apparatus has a first terminal with a first polarity and a second terminal with a different polarity. The first terminal is electrically coupled to the wafer, while an anode is positioned within the plating chamber, connected to the second terminal. The design features a membrane support with defined apertures, allowing for varying aperture-area to surface-area ratios in different zones.

Another notable patent involves semiconductor devices that feature conductive pad structures with multi-barrier films. This invention includes a substrate, an interconnect structure, and a conductive pad structure. The interconnect structure is situated over the substrate and comprises a top metal layer. The conductive pad structure, located above the interconnect structure, consists of a lower barrier film, an upper barrier film, and an aluminum-containing layer. The unique aspect of this design is that both barrier films are made from the same material, with the upper barrier film having a higher nitrogen atomic percentage than the lower barrier film.

Career Highlights

Chao-Lung Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has significantly impacted the development of advanced semiconductor technologies.

Collaborations

Chao-Lung Chen has collaborated with notable colleagues, including Po-Hsun Huang and Po-Han Wang. Their combined expertise has contributed to the success of various projects within the semiconductor field.

Conclusion

Chao-Lung Chen's innovative contributions to semiconductor technology and electroplating methods highlight his role as a key inventor in the industry. His patents reflect a commitment to advancing technology and improving semiconductor device performance.