Location History:
- Seoul, KR (2002 - 2011)
- Gyeonggi-do, KR (2012)
- Osan-si, KR (2017 - 2022)
Company Filing History:
Years Active: 2002-2022
Title: Innovator Chan-Hoon Park: Pioneering Advances in Plasma Processing Technology
Introduction: Chan-Hoon Park, based in Seoul, South Korea, is a notable inventor with a track record of 10 patents to his name. His work primarily focuses on advancements in plasma processing methods, which play a critical role in the semiconductor manufacturing industry.
Latest Patents: Chan-Hoon Park's latest patents include a plasma processing method, a plasma processing apparatus, and a method of manufacturing semiconductor devices using these innovations. The plasma processing method involves loading a substrate onto a lower electrode within a chamber, followed by the application of plasma power to create plasma. A specialized voltage function characterized by a nonsinusoidal wave is generated. This function includes a DC pulse and a ramp portion, with specific settings for the slope of the ramp and the duration ratio to optimize ion energy distribution at the substrate surface. Furthermore, a bias power of this nonsinusoidal wave is applied to enhance the processing capabilities.
Career Highlights: Currently, Chan-Hoon Park is employed at Samsung Electronics Co., Ltd., where he applies his expertise in plasma processing to develop state-of-the-art semiconductor manufacturing techniques. His contributions have significantly bolstered the company's position in the highly competitive electronics market.
Collaborations: Throughout his career, Chan-Hoon Park has collaborated with distinguished colleagues, including Je-Woo Han and Moon-Sang Lee, further enriching the innovative atmosphere at Samsung Electronics Co., Ltd. Their teamwork fosters a creative exchange of ideas, leading to the advancement of cutting-edge technology in the field.
Conclusion: With an impressive portfolio of inventions and patents, Chan-Hoon Park stands out as a key innovator in plasma processing technology. His work not only enhances semiconductor manufacturing processes but also contributes to the broader advancements in electronics and technology. The future holds great promise for further innovations from this talented inventor.