The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2012
Filed:
Feb. 04, 2011
Moon-sang Lee, Gyeonggi-do, KR;
Bong-jin Yum, Seoul, KR;
Hong-seok Kim, Gyeonggi-do, KR;
Kwan-woo Kim, Jeollabuk-do, KR;
Seung-hyun Kim, Incheon, KR;
Chan-hoon Park, Gyeonggi-do, KR;
Moon-Sang Lee, Gyeonggi-do, KR;
Bong-Jin Yum, Seoul, KR;
Hong-Seok Kim, Gyeonggi-do, KR;
Kwan-Woo Kim, Jeollabuk-do, KR;
Seung-Hyun Kim, Incheon, KR;
Chan-Hoon Park, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Maetan-dong, Yeongtong-gu, Suwon-si, Gyeonggi-do, KR;
Abstract
A measurement system and a measurement method, which can obtain a measurement value close to a true value considering an overlay measurement error according to a higher order regression analysis model. The measurement system and the measurement method provide a technique for determining optimal positions of shots to be measured using an optimal experimental design. When the regression analysis model and the number of shots to be measured are determined in advance, a method is used for determining an optimal number of shots to be measured according to the regression analysis model and process dispersion using a confidence interval estimating method. A dynamic sampling method is used for dynamically changing the number and positions of shots to be measured according to a change in process features by combining the above two methods. And, when erroneous data is detected, or when measured data is missing, a robust regression analysis method and a technique for filtering the erroneous data and the missing data are used.