Bruno W Schueler

Title: Bruno W. Schueler: Innovator in Semiconductor Metrology

Introduction

Bruno W. Schueler is an accomplished inventor based in San Jose, California, with a notable portfolio of 25 patents. His contributions primarily span the field of semiconductor metrology and surface analysis, where he has developed innovative solutions integral to the industry's advancement.

Latest Patents

Among his latest patents, Schueler has introduced systems and approaches for semiconductor metrology utilizing secondary ion mass spectrometry (SIMS). This technology features a sophisticated SIMS system that includes a sample stage, where a primary ion beam is directed. It also incorporates an extraction lens designed to create a low extraction field for secondary ions emitted from the sample. Additionally, a magnetic sector spectrograph is connected to the extraction lens along the SIMS system's optical path, consisting of an electrostatic analyzer (ESA) paired with a magnetic sector analyzer (MSA).

Another significant patent by Schueler involves improved patterned X-ray emitting targets. This innovation provides a new class of X-ray sources and systems, including X-ray reflectance scatterometry (XRS), X-ray photoelectron spectroscopy (XPS), and X-ray fluorescence (XRF) systems utilizing these advanced targets.

Career Highlights

Throughout his career, Bruno W. Schueler has worked with prominent companies such as Revera, Incorporated and Nova Measuring Instruments Ltd., where he played a crucial role in driving innovation in the semiconductor field. His expertise and inventive spirit have significantly contributed to the development of advanced metrology and analysis systems.

Collaborations

Schueler has collaborated with notable professionals in his field, including David Allen Reed and Rodney C. Smedt. These partnerships have helped foster a creative environment that promotes innovation and the further advancement of semiconductor technologies.

Conclusion

Bruno W. Schueler stands out as a key innovator in semiconductor metrology, with a robust patent portfolio that highlights his commitment to technological advancement. His inventive solutions in semiconductor analysis and X-ray technologies not only enhance industrial capabilities but also pave the way for future innovations in the field.