The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 29, 2016

Filed:

Aug. 23, 2013
Applicants:

Jeffrey T. Fanton, Los Altos, CA (US);

Rodney Smedt, Los Gatos, CA (US);

Bruno W. Schueler, San Jose, CA (US);

David A. Reed, Belmont, CA (US);

Inventors:

Jeffrey T. Fanton, Los Altos, CA (US);

Rodney Smedt, Los Gatos, CA (US);

Bruno W. Schueler, San Jose, CA (US);

David A. Reed, Belmont, CA (US);

Assignee:

ReVera, Incorporated, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/20 (2006.01); G01N 23/227 (2006.01); H01J 37/256 (2006.01); G21K 1/06 (2006.01); B23Q 17/20 (2006.01);
U.S. Cl.
CPC ...
G01N 23/20 (2013.01); G01N 23/2273 (2013.01); G21K 1/06 (2013.01); H01J 37/256 (2013.01); B23Q 17/20 (2013.01); G21K 2201/064 (2013.01); Y10T 29/49764 (2015.01); Y10T 29/49769 (2015.01); Y10T 29/49771 (2015.01); Y10T 29/53022 (2015.01);
Abstract

Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy (XPS) are disclosed. For example, a method of fabricating a platelet of a monochromator for X-ray photoelectron spectroscopy involves placing a crystal on a stage of an X-ray measuring apparatus, the crystal having a top surface. The method also involves measuring, by X-ray reflection, an orientation of a crystal plane of the crystal, the crystal plane beneath the top surface of the crystal and having a primary axis. The method also involves measuring a surface angle of the top surface of the crystal by measuring a light beam reflected from the top surface of the crystal.


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