Company Filing History:
Years Active: 2019-2022
Title: Brendan O'Brien: Innovator in Multiple Patterning Technologies
Introduction
Brendan O'Brien is a notable inventor based in Ballston Spa, NY (US), recognized for his contributions to the field of semiconductor manufacturing. He holds a total of 5 patents, showcasing his expertise in innovative technologies.
Latest Patents
O'Brien's latest patents include groundbreaking methods in self-aligned multiple patterning. One of his patents, titled "Multiple patterning with mandrel cuts defined by block masks," describes a process where a hardmask is deposited over an interlayer dielectric layer. A mandrel is formed over the hardmask, and a block mask is created to cover specific sections of the mandrel. This innovative approach allows for the definition of a pattern that includes mandrel lines separated by the first lengthwise section of the mandrel. The pattern is then transferred to the hardmask and subsequently to the interlayer dielectric layer through etching processes. Another significant patent, "Multiple patterning with lithographically-defined cuts," involves forming mandrels over a hardmask and utilizing a conformal spacer layer to create trenches that expose portions of the hardmask. This method enhances the precision of the etching process, further advancing the field of semiconductor technology.
Career Highlights
Throughout his career, Brendan O'Brien has worked with prominent companies in the semiconductor industry, including GlobalFoundries Inc. and GlobalFoundries U.S. Inc. His work has significantly impacted the development of advanced manufacturing techniques.
Collaborations
O'Brien has collaborated with esteemed colleagues such as Terry Allen Spooner and Martin O'Toole, contributing to various projects that push the boundaries of semiconductor technology.
Conclusion
Brendan O'Brien's innovative work in multiple patterning technologies has established him as a key figure in the semiconductor industry. His patents reflect a commitment to advancing manufacturing processes, making significant contributions to the field.
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