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For the Inventor, By the Inventor

Fremont, CA, United States of America

Bi Ming Yen

This inventor holds 6 USPTO granted patents and 1 EPO patent. Top assignee: Lam Research Corporation. Active years: 2006-2014.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Bi Ming Yen. Retrieved from https://idiyas.com/inventor/bi-ming-yen-cgwvusrn

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 6

% Patents Active = 83.3


Average Co-Inventor Count = 4.8

ph-index = 3

Forward Citations = 179(Granted Patents)


Company Filing History:

goldMedal6 out of 3,953 
 
Lam Research Corporation
 patents

Years Active: 2006-2014

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6 patents (USPTO):Explore Patents
1. 8652298 - Triode reactor design with multiple radiofrequency powers (2014-02-18),
2. 7951616 - Process for wafer temperature verification in etch tools (2011-05-31),
3. 7789991 - Lag control (2010-09-07),
4. 7442114 - Methods for silicon electrode assembly etch rate and etch uniformity recovery (2008-10-28),
5. 7307025 - Lag control (2007-12-11),
6. 7041230 - Method for selectively etching organosilicate glass with respect to a doped silicon carbide (2006-05-09),

Title: Bi Ming Yen: Innovator in Semiconductor Manufacturing

Introduction

Bi Ming Yen is a prominent inventor based in Fremont, CA (US). He has made significant contributions to the field of semiconductor manufacturing, holding a total of 6 patents. His work focuses on advanced technologies that enhance the efficiency and accuracy of semiconductor processes.

Latest Patents

One of Bi Ming Yen's latest patents is a triode reactor design with multiple radiofrequency powers. This invention presents methods, systems, and computer programs for semiconductor manufacturing. The wafer processing apparatus includes a top electrode, a bottom electrode, and multiple radio frequency (RF) power sources. The design allows for flexible configurations, enabling improved performance in semiconductor applications.

Another notable patent involves a process for wafer temperature verification in etch tools. In this process, a blank wafer is placed in an etch chamber, where a layer is deposited over it. The thickness of the deposited layer is measured to calculate wafer temperature accuracy. This innovation ensures that the etch chamber is compensated according to the calculated accuracy, enhancing the overall reliability of the etching process.

Career Highlights

Bi Ming Yen is currently employed at Lam Research Corporation, a leading company in the semiconductor industry. His work at Lam Research has positioned him as a key player in the development of cutting-edge technologies that drive the industry forward.

Collaborations

Bi Ming Yen collaborates with talented individuals in his field, including coworkers Binet A Worsham and Sean S Kang. These collaborations foster an environment of innovation and creativity, contributing to the advancement of semiconductor manufacturing technologies.

Conclusion

Bi Ming Yen's contributions to semiconductor manufacturing through his innovative patents and collaborative efforts highlight his importance in the field. His work continues to influence the industry, paving the way for future advancements in technology.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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