Location History:
- Scottsdale, AZ (US) (2003 - 2015)
- Seattle, WA (US) (2018)
Company Filing History:
Years Active: 2003-2018
Title: Innovations of Audunn Ludviksson
Introduction
Audunn Ludviksson is a prominent inventor based in Scottsdale, AZ, known for his significant contributions to the field of integrated circuit manufacturing. With a total of 13 patents to his name, he has developed innovative methods that enhance the efficiency and effectiveness of semiconductor processing.
Latest Patents
Among his latest patents is the invention titled "Neutral beam etching of Cu-containing layers in an organic compound gas environment." This invention presents a method and apparatus for dry etching pure copper and copper-containing layers, which is crucial for manufacturing integrated circuits. The process utilizes a directional beam of oxygen atoms with high kinetic energy to oxidize the copper layers, followed by the use of organic compound etching reagents that react with the oxidized copper to create volatile etch products. This method allows for low-temperature, anisotropic etching in accordance with a patterned hard mask or photoresist.
Another notable patent is the "Post deposition plasma cleaning system and method." This invention outlines a process for substrate treatment, where a substrate is placed in a deposition chamber to deposit a film. After the deposition, the substrate is transferred to a treatment chamber where a plasma cleaning process is performed, ensuring the substrate is adequately prepared for further processing.
Career Highlights
Audunn Ludviksson has made a significant impact in the semiconductor industry through his work at Tokyo Electron Limited. His expertise in etching and cleaning processes has positioned him as a key figure in advancing technologies that are essential for modern electronics.
Collaborations
Throughout his career, Audunn has collaborated with notable colleagues, including Lee Chen and Eric J Strang. These partnerships have fostered an environment of innovation and have contributed to the successful development of his patented technologies.
Conclusion
Audunn Ludviksson's contributions to the field of integrated circuit manufacturing through his innovative patents demonstrate his expertise and commitment to advancing technology. His work continues to influence the semiconductor industry, paving the way for future innovations.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.