Andrei Veldman

Title: Innovations and Contributions of Andrei Veldman in Optical Metrology

Introduction

Andrei Veldman, based in Sunnyvale, CA, is an accomplished inventor with a remarkable portfolio of 21 patents. His work primarily focuses on advancements in optical metrology and semiconductor technology. Veldman's contributions have significantly impacted the fields of precision measurement and analysis, particularly through innovative tools and systems.

Latest Patents

Among Veldman’s latest patents is an optical metrology tool equipped with modulated illumination sources. This advanced system incorporates a modulatable illumination source to project light onto a sample, alongside a detector designed to capture the reflected illumination. Notably, the system features a modulation control system that adjusts the drive current of the illumination source to create light with specific coherence lengths. Furthermore, it employs time-sequential interleaving of multiple light sources to produce periodic pulse trains, enhancing multi-wavelength optical metrology.

Another of Veldman’s significant inventions is a full beam metrology system for x-ray scatterometry. This innovative approach involves characterizing the dimensions and material properties of semiconductor devices through full beam x-ray scatterometry. By utilizing both direct and scattered beams simultaneously, this system achieves high throughput and improved measurement accuracy. It integrates advanced photon counting detectors which minimize parasitic backscattering, further enhancing measurement reliability.

Career Highlights

Throughout his career, Veldman has worked with prominent companies, including KLA-Tencor Corporation and KLA Corporation, leading major research and development efforts aimed at improving semiconductor manufacturing processes. His work has not only contributed to the companies he has been a part of but has also played a role in shaping industry standards for optical metrology.

Collaborations

Veldman has collaborated with notable professionals in his field, including John Josef Hench and Andrei V. Shchegrov. These collaborations have resulted in innovative solutions and advancements in optical measurement technologies, highlighting Veldman’s commitment to teamwork and knowledge exchange within the scientific community.

Conclusion

Andrei Veldman's extensive patent portfolio and innovative approach to optical metrology demonstrate his significant contributions to technology and engineering. His inventions not only advance scientific understanding but also provide practical solutions for the semiconductor industry, showcasing the importance of innovation in driving progress.