The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2019
Filed:
Jul. 22, 2016
Kla-tencor Corporation, Milpitas, CA (US);
Andrei V. Shchegrov, Campbell, CA (US);
Lawrence D. Rotter, Pleasanton, CA (US);
David Y. Wang, Santa Clara, CA (US);
Andrei Veldman, Sunnyvale, CA (US);
Kevin Peterlinz, Fremont, CA (US);
Gregory Brady, San Jose, CA (US);
Derrick A. Shaughnessy, San Jose, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
The system includes a modulatable illumination source configured to illuminate a surface of a sample disposed on a sample stage, a detector configured to detect illumination emanating from a surface of the sample, illumination optics configured to direct illumination from the modulatable illumination source to the surface of the sample, collection optics configured to direct illumination from the surface of the sample to the detector, and a modulation control system communicatively coupled to the modulatable illumination source, wherein the modulation control system is configured to modulate a drive current of the modulatable illumination source at a selected modulation frequency suitable for generating illumination having a selected coherence feature length. In addition, the present invention includes the time-sequential interleaving of outputs of multiple light sources to generate periodic pulse trains for use in multi-wavelength time-sequential optical metrology.