Company Filing History:
Years Active: 2021-2025
Title: Innovations of An-Hsuan Lee in Chemical Mechanical Polishing
Introduction
An-Hsuan Lee is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of chemical mechanical polishing (CMP), with a total of 12 patents to his name. His work focuses on enhancing the efficiency and effectiveness of polishing processes used in semiconductor manufacturing.
Latest Patents
Among his latest patents, An-Hsuan Lee has developed a chemical mechanical polishing slurry composition and a method of polishing a metal layer. This CMP slurry composition includes about 0.1 to 10 parts by weight of a metal oxide and about 0.1 to 10 parts by weight of a chelator, which can be a thiol compound or a thiolether compound. Additionally, he has patented a method for fabricating a polishing pad for CMP processes. This method involves forming an interpenetrating polymer network with a porous top pad that maintains consistent surface roughness during the polishing of a workpiece.
Career Highlights
An-Hsuan Lee is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate in the field of semiconductor processing. His expertise in CMP has positioned him as a key figure in advancing polishing technologies.
Collaborations
An-Hsuan Lee has collaborated with notable colleagues, including Chun-Hung Liao and Chen-Hao Wu, who contribute to the research and development efforts in their field.
Conclusion
An-Hsuan Lee's contributions to chemical mechanical polishing have significantly impacted the semiconductor industry. His innovative patents and ongoing work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as a leading inventor in this critical area of technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.