Company Filing History:
6 out of 1,787 
1 out of 641 
Years Active: 2008-2015
Title: Aleksey Petrenko: Innovator in Wafer Inspection Technology
Introduction
Aleksey Petrenko is a notable inventor based in Milpitas, CA (US). He has made significant contributions to the field of wafer inspection technology, holding a total of 7 patents. His work focuses on improving the efficiency and effectiveness of inspection systems used in semiconductor manufacturing.
Latest Patents
One of his latest patents is titled "Illumination energy management in surface inspection." This patent describes a system and method for managing illumination energy applied to illuminated portions of a scanned wafer. The goal is to mitigate illumination-induced damage while maintaining the signal-to-noise ratio (SNR) of the inspection system. The method involves rotating the wafer at a selected spin frequency and varying the illumination energy based on the radial distance from the center of the wafer.
Another significant patent is "Method and apparatus for producing and measuring dynamically focused, steered, and shaped oblique laser illumination for spinning wafer inspection system." This invention provides a method for producing high-frequency dynamically focused oblique laser illumination. It allows for automatic beam shaping and steering, ensuring precise measurements and corrections during the inspection process.
Career Highlights
Aleksey has worked with prominent companies in the industry, including Kla Tencor Corporation and Kla-Tencor Technologies Corporation. His experience in these organizations has contributed to his expertise in wafer inspection technologies and innovations.
Collaborations
Throughout his career, Aleksey has collaborated with talented professionals, including Christian Wolters and Kurt Lindsay Haller. These collaborations have further enhanced his work and contributions to the field.
Conclusion
Aleksey Petrenko is a distinguished inventor whose work in wafer inspection technology has led to several important patents. His innovative approaches continue to influence the semiconductor industry and improve inspection methodologies.