The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2008
Filed:
Apr. 04, 2006
Alexander Belyaev, Mountain View, CA (US);
Daniel Kavaldjiev, Milpitas, CA (US);
Amith Murali, Fremont, CA (US);
Aleksey Petrenko, Milpitas, CA (US);
Mike D. Kirk, Los Altos Hills, CA (US);
David Shortt, Milpitas, CA (US);
Brian L. Haas, San Jose, CA (US);
Kurt L. Haller, Pleasanton, CA (US);
Alexander Belyaev, Mountain View, CA (US);
Daniel Kavaldjiev, Milpitas, CA (US);
Amith Murali, Fremont, CA (US);
Aleksey Petrenko, Milpitas, CA (US);
Mike D. Kirk, Los Altos Hills, CA (US);
David Shortt, Milpitas, CA (US);
Brian L. Haas, San Jose, CA (US);
Kurt L. Haller, Pleasanton, CA (US);
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Abstract
Computer-implemented methods and systems for determining a configuration for a light scattering inspection system are provided. One computer-implemented method includes determining a three-dimensional map of signal-to-noise ratio values for data that would be acquired for a specimen and a potential defect on the specimen by the light scattering inspection system across a scattering hemisphere of the inspection system. The method also includes determining one or more portions of the scattering hemisphere in which the signal-to-noise ratio values are higher than in other portions of the scattering hemisphere based on the three-dimensional map. In addition, the method includes determining a configuration for a detection subsystem of the inspection system based on the one or more portions of the scattering hemisphere.