Company Filing History:
6 out of 1,787 
5 out of 641 
Years Active: 2008-2020
Title: Kurt Lindsay Haller: Innovator in Wafer Inspection Technologies
Introduction
Kurt Lindsay Haller is a prominent inventor based in Pleasanton, CA (US), known for his significant contributions to the field of wafer inspection technologies. With a total of 11 patents to his name, Haller has developed innovative methods that enhance the detection and analysis of particle defects on semiconductor wafers.
Latest Patents
Haller's latest patents include groundbreaking technologies such as the "Activation of Wafer Particle Defects for Spectroscopic Composition Analysis." This patent describes methods and systems for detecting particle defects on a wafer surface, transforming these defects into a spectroscopically active state, and identifying the material composition of the activated particles using spectroscopic techniques. The process involves transforming particle defects through chemical, thermal, or photochemical treatments, allowing for the observation of atomic vibrational bands. This innovation enables both defect detection and composition analysis to be performed on the same inspection tool, streamlining the process significantly.
Another notable patent is the "System and Method for Luminescent Tag Based Wafer Inspection." This invention features a luminescent tag-based defect detection system that includes a luminescent tag attachment assembly, an illumination source, and a set of optical elements. The system allows for the selective attachment of luminescent tags to defects on a sample, facilitating effective defect detection and analysis.
Career Highlights
Throughout his career, Haller has worked with leading companies in the semiconductor industry, including KLA-Tencor Corporation and KLA-Tencor Technologies Corporation. His work has been instrumental in advancing wafer inspection technologies, making significant impacts on the efficiency and accuracy of defect detection.
Collaborations
Haller has collaborated with notable professionals in the field, including Christian Wolters and Aleksey Petrenko. These collaborations have contributed to the development of innovative solutions in wafer inspection.
Conclusion
Kurt Lindsay Haller's contributions to wafer inspection technologies have established him as a key figure in the industry. His innovative patents and career achievements reflect his dedication to advancing semiconductor technology.