Akihiro Teramoto

Title: Akihiro Teramoto: Innovator in Substrate Processing Technology

Introduction

Akihiro Teramoto is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing, holding a total of 14 patents. His innovative work has advanced the technology used in various industries, particularly in semiconductor manufacturing.

Latest Patents

Among his latest patents, Teramoto has developed a substrate processing system and method. This system includes a carry-in/out section for cassettes that accommodate multiple substrates. It features a batch processing section that processes a wafer lot of substrates collectively while standing upright. Additionally, there is a single-wafer processing section that processes each substrate individually in a horizontal state. The interface section of the system delivers substrates from the batch processing section to the single-wafer processing section, incorporating a standby table that holds substrates in contact with pure water and a transfer mechanism for efficient delivery.

Another notable patent involves a liquid amount measuring method and a computer-readable recording medium. This system includes a measuring unit that is detachably provided with a placement portion. It features a measuring jig for processing liquid measurement, a liquid processing unit that supplies the processing liquid, and a transfer mechanism for moving the measuring jig. The controller executes various processes, including transferring the measuring jig and calculating the ejection amount of the processing liquid based on measurement values.

Career Highlights

Teramoto has worked with notable companies in the semiconductor industry, including Tokyo Electron Limited. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking technologies in substrate processing.

Collaborations

Throughout his career, Teramoto has collaborated with esteemed colleagues such as Tokutarou Hayashi and Toru Tokimatu. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Akihiro Teramoto's contributions to substrate processing technology have made a significant impact on the industry. His innovative patents and collaborations highlight his role as a leading inventor in this field.