The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2025
Filed:
Feb. 28, 2023
Tokyo Electron Limited, Tokyo, JP;
Keita Hirase, Kumamoto, JP;
Yukiyoshi Saito, Kumamoto, JP;
Akihiro Teramoto, Kumamoto, JP;
Koji Tanaka, Kumamoto, JP;
Shota Takei, Kumamoto, JP;
Masataka Gosho, Kumamoto, JP;
Kazuaki Kitamura, Kumamoto, JP;
Shinichi Ikeda, Kumamoto, JP;
Shunsuke Kurizaki, Kumamoto, JP;
Yuji Kimura, Kumamoto, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate processing system includes: a carry-in/out section in which a cassette accommodating a plurality of substrates is carried in/out; a batch processing section in which a wafer lot including the plurality of substrates is collectively processed in a state where each of the plurality of substrates stand upright; a single-wafer processing section in which the plurality of substrates included in the wafer lot are processed one by one in a horizontal state; and an interface section that delivers the plurality of substrates from the batch processing section to the single-wafer processing section. The interface section includes: a standby table that horizontally holds a substrate in a state of being in contact with pure water; and a transfer mechanism that delivers the substrate from the batch processing section to the standby table.