The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2026
Filed:
Oct. 04, 2023
Tokyo Electron Limited, Tokyo, JP;
Youichi Masaki, Koshi, JP;
Mitsuteru Yano, Koshi, JP;
Eiichi Sekimoto, Koshi, JP;
Tsuyoshi Otsuka, Koshi, JP;
Akihiro Teramoto, Koshi, JP;
Teppei Ito, Koshi, JP;
Koji Takayanagi, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A motor control method for transferring an object to be transferred by a moving object that moves by driving of a motor in a substrate processing apparatus, includes: a data acquisition process of acquiring, at different times, pieces of drive data which relate to the driving of the motor and vary with heat generation of the motor; and a transfer process of transferring the object to be transferred by controlling current to be supplied to the motor, based on each of the pieces of drive data, to compensate for displacement of the object to be transferred from a target transfer position due to the heat generation of the motor.