Mitsuteru Yano

Title: Mitsuteru Yano: Innovator in Substrate Processing Technology

Introduction

Mitsuteru Yano is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing, holding a total of 6 patents. His work focuses on developing advanced technologies that enhance the efficiency and effectiveness of substrate processing apparatuses.

Latest Patents

Yano's latest patents include a substrate processing apparatus and a state determination method, along with a computer-readable recording medium. The substrate processing apparatus is designed to process a substrate and features a functional component, a nozzle for gas passage, a nozzle flow path, a flow rate sensor, and a controller that determines the distance between an interfering object and the functional component based on the flow rate sensor's measurements. Another notable patent is a transfer apparatus that mounts and transfers components using a driven means. This apparatus includes a driving means that rotates a pulley to move a belt, along with a transfer monitoring means that detects the torque value required to move the driven means and calculates a torque differential value to assess the transfer state.

Career Highlights

Mitsuteru Yano is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His innovative work has positioned him as a key figure in the development of substrate processing technologies.

Collaborations

Yano has collaborated with notable coworkers, including Masahide Tadokoro and Ryoichi Uemura. Their combined expertise contributes to the advancement of technology in their field.

Conclusion

Mitsuteru Yano's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor. His innovative solutions continue to shape the industry and improve processing techniques.