The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2014
Filed:
Dec. 17, 2012
Tokyo Electron Limited, Tokyo, JP;
Junnosuke Maki, Koshi, JP;
Mitsuteru Yano, Koshi, JP;
Seiji Nakano, Koshi, JP;
Tsuyoshi Watanabe, Koshi, JP;
Yasunori Toyoda, Koshi, JP;
Suguru Enokida, Koshi, JP;
Naruaki Iida, Koshi, JP;
Hiroki Harada, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A transfer apparatus for mounting and transferring a transferred component on a driven means, the transfer apparatus includes: a driving means for rotating a driving side pulley by a rotational driving force of a motor to move a belt wound around the driving side pulley, thereby moving the driven means coupled to the belt in a predetermined direction; and a transfer monitoring means for monitoring a transfer state of the driven means, wherein the transfer monitoring means detects a torque value of the motor required to move the driven means, calculates a torque differential value of the torque value with respect to time based on the detected torque value, and detects the transfer state using the calculated torque differential value.