The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 29, 2020
Filed:
Feb. 22, 2018
Tokyo Electron Limited, Tokyo, JP;
Tokutarou Hayashi, Koshi, JP;
Hiroki Harada, Koshi, JP;
Akihiro Teramoto, Koshi, JP;
Tooru Tokimatu, Koshi, JP;
Masahiro Abe, Koshi, JP;
Kazutoshi Ishimaru, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A device includes a substrate holding unitconfigured to hold a substrate and be movable in a transversal direction to transfer the substrate from one module to another module; a first detecting unitconfigured to detect a position of the substrate on the substrate holding unitbefore the substrate holding unittransfers the substrate into the another module after receiving the substrate from the one module; second detecting unitsandconfigured to detect a position deviation between a position of the substrate holding unit, which is located at a temporary position set to transfer the substrate into the another module, and the temporary position; and a position determining unitconfigured to determine a transfer position where the substrate is transferred into the another module based on the position of the substrate on the substrate holding unitand the position deviation.